Metrology and diagnostic techniques for nanoelectronics
Ma, Zhiyong, Seiler, David G
This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging. - Provided by the publisher.
Abstract: This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging. - Provided by the publisher
Abstract: This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging. - Provided by the publisher
种类:
年:
2017
出版社:
Pan Stanford Publishing
语言:
english
页:
1411
ISBN 10:
1351733958
ISBN 13:
9781351733953
文件:
PDF, 57.60 MB
IPFS:
,
english, 2017
因版权方投诉,本书无法下载